Artificial Passivation Films and Real Passivation Films.
نویسندگان
چکیده
منابع مشابه
Effect of passivation on stress relaxation in electroplated copper films
The present study investigated the effect of passivation on the kinetics of interfacial mass transport by measuring stress relaxation in electroplated Cu films with four different cap layers: SiN, SiC, SiCN, and a Co metal cap. Stress curves measured under thermal cycling showed different behaviors for the unpassivated and passivated Cu films, but were essentially indifferent for the films pass...
متن کاملEffects of Passivation Layer on Stress Relaxation and Mass Transport in Electroplated Cu Films
Recent studies have shown that the Cu/cap layer interface is the dominant diffusion path for electromigration (EM) in Cu interconnects, making it important to develop effective methods to evaluate the effect of passivation layer on interfacial mass transport and EM lifetime for Cu interconnects. This work shows that a set of isothermal stress relaxation tests together with appropriate modeling ...
متن کاملEffect of Grain Size and Hydrogen Passivation on the Electrical Properties of Nanocrystalline Silicon Films
The properties of mixed-phase (nanocrystalline/amorphous) silicon layers produced by reactive RF-sputtering are described. The chemical composition and nanostructure [i.e. nanocrystal (NC) size and volume fraction] of the films were studied by Rutherford backscattering spectroscopy (RBS) and micro-Raman spectroscopy, respectively. Samples with different fractions of the nanocrystalline phase an...
متن کاملAmorphous Silicon Compound Films for Surface Passivation and Antireflection Coating of Crystalline Silicon Solar Cells
This chapter gives an overview of the theoretical bases of surface passivation and antireflection coating and describes the methods and equipment used to characterize the layers created in this work. While surface passivation is quantified by the effective surface recombination velocity Seff , this parameter cannot be measured directly. Instead, the lifetime measurements by QSSPC and ”PCD carri...
متن کاملSystems and control challenges in photovoltaic manufacturing processes: A modeling strategy for passivation and antireflection films
A view of contemporary systems and control challenges in PV cell manufacturing is given in this paper, with emphasis on developing a modeling strategy for the optimization of thin-film silicon nitride SiNx:H films used for passivation and anti-reflection coatings in single (sc-) and multicrystalline silicon (mc-Si) solar cells. The overall framework integrates three modeling modules: a remote p...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Materia Japan
سال: 1995
ISSN: 1340-2625,1884-5843
DOI: 10.2320/materia.34.1042